Study of ring resonators and slow structure in sandwich slot waveguides
Rigo Eveline
A Si rich-oxide layer with low refractive index and optimized optical nonlinearities has been grown by plasma-enhanced chemical-vapour deposition between two silicon slab waveguides. Various basics building blocks based on this sandwich slot structure have been fabricated by standard Deep-UV lithography. The losses measurements were performed at 1550 nm for TE and TM polarisation. We studied also waveguides coupled to one or two ring resonators and found Q factor up to 10000. We studied slow light structures. One-dimensional photonic crystal structure is used for a slow light effect in a coupled resonators optical horizontal slot waveguide with Sinc. We report on design, simulations and preliminary optical transmission characterization around 1.55 μm.